Reduction of tungsten precursors in inductively coupled RF discharge
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Progress in Plasma Processing of Materials 2003 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma reduction; tungsten carbide;inductively coupled RF plasma; tungsten precursors |
| Description | Synthesis of catalytically active tungsten carbide compounds with the aid of plasmachemical reaction.Ammonium paratungstate (APT) was used as precursor.The final powder was mixture of tungsten and tungsten carbide (6%), grain size 50 um. |
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