Plasma potential in low-pressure capacitive r.f. discharges
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | WDS'03 Proceedings of contributed papers, part 2 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma potential; hydrogen; Langmuir probe |
| Description | We observed two different discharge modes in hydrogen. The modes differed significantly in a visual appearance, plasma potential and in the shape of electron energy distribution function. In order to explain it we established a simple model anabling an aproximate calculation of the plasma potential. This model is not capable to predict real values of the plasma potential but it can qualitatively explain the observed effect. |
| Related projects: |