Study of reaction between HMDSO and O atoms in afterglow

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Authors	KUDRLE Vít DOLEŽAL Vojtěch TÁLSKÝ Antonín JANČA Jan
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of ISPC 14
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasmachemical reaction; HMDSO; EPR
Attached files	ispc03.zip
Description	In this work the kinetics of reactions between atomic oxygen and HMDSO was studied. Rate constant was measured by means of electron paramagnetic resonance spectroscopy.
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates