X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	HOLÝ Václav
Year of publication	2003
Type	Article in Periodical
Magazine / Source	Nuclear Instruments & Methods in Physics Research A
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
Description	X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires
Related projects:	Physical properties of new materials and layered structures