Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Proceedings of 12th International Congress on Plasma Physics |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | surfatron plasma; argon; helium; probes; optical emission spectroscopy |
| Description | The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases, N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactive gas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra). |
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