Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch

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Authors	JAŠEK Ondřej ELIÁŠ Marek BUBLAN Martin KUDRLE Vít ZAJÍČKOVÁ Lenka MATĚJKOVÁ Jiřina REK Antonín BURŠÍK Jiří KADLĚČÍKOVÁ Magdaléna
Year of publication	2005
Type	Article in Proceedings
Conference	Proceedings of 15th Symposion on Application of Plasma Processes
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	carbon nanotubes; microwave discharge; scanning electron microscopy
Description	In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.
Related projects:	Synthesis of carbon micro- and nanostructures by plasma technologies