Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | NENAMAT International Conference Proceedings NANO05 |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Mechanical properties; Amorphous silicon; Nanocrystalline Silicon |
| Description | The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method. |
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