Digital two-wavelength holographic interference microscopy for surface roughness measurement
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | Proceedings of SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Holography; Interference; Surface roughness; Metrology |
| Description | A new approach to surface roughness measurement based on the digital two-wavelength holographic interference microscopy with the synthetic wavelength is presented. Two holograms of a rough surface are recorded step by step at two wavelengths of laser light by means of a CCD camera. Both holograms are numerically superposed and then reconstructed. Two reconstructed digital waves obtained numerically interfere. The surface roughness parameters can be determined from the shape of interference fringes in that interferogram created. The range of measurable height irregularities of the surface is given by the synthetic wavelength, which is indirectly proportional to the difference of the selected wavelengths. |
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