Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | Applications of Nanotubes and Nanowires MRS Proceedings Volume 1018E |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.mrs.org/s_mrs/sec_subscribe.asp?CID=8760&DID=197692&action=detail |
| Field | Plasma physics |
| Keywords | gas pressure sensor; carbon nanotubes |
| Description | In this paper the development and fabrication of the pressure sensor based on electron field emission from carbon nanotubes (CNTs) was described. The sensor consisted of two parts: a silicon membrane as an anode; and multi-walled CNTs on a silicon cathode, creating a vacuum micro-chamber. Both electrodes were fabricated from the silicon single crystal (Si) wafer of an orientation 100 doped by phosphorus. The CNTs were grown by a plasma enhanced CVD using an iron catalyst in an atmospheric pressure microwave torch. The catalyst was patterned into an area corresponding to the membrane dimensions. The thin CNTs with a diameter of about 80 nm were standing vertically perpendicular to the substrate due to a crowding effect. In order to find the threshold current, the emission characteristics of prepared sensors were measured. |
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