Thermal Desorption Spectroscopy Study on Diamond-like Carbon Coatings

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Authors	GARDELKA Tomáš BURŠÍKOVÁ Vilma SŤAHEL Pavel
Year of publication	2009
Type	Article in Proceedings
Conference	Frontiers in Low Temperature Plasma Diagnostic 8
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Thermal Desorption Spectroscopy; Diamond-like Carbon Coatings
Description	Nanostructured silicon-oxide containing diamond-like coatings were prepared with low compressive stress, high fracture toughness, low roughness, low friction coeficient and good adhesion to different substrates. The coatings were stable up to minimum 400 st.C. The hydrogen and hydrocarbon desorption did not cause deterioration of the films.
Related projects:	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Nanometrologie využívající metod rastrovací sondové mikroskopie