Measurement of plasma potential waveform by an uncompensated probe

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	DVOŘÁK Pavel
Year of publication	2010
Type	Article in Periodical
Magazine / Source	Plasma Sources Sci. Technol.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma potential; probe; higher harmonic frequencies; capacitively coupled discharge; plasma
Description	A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in nitrogen capacitively coupled discharge. Strong influence of the sheath around the probe on the probe voltage and correlation between the probe current waveform and the discharge current are shown. At low pressure, the plasma potential waveform contains high amount of higher harmonic frequencies whose amplitudes are comparable with the amplitude of the fundamental frequency.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface