Role vodíku na strukturální změny SiGe:H vrstev
| Title in English | Role of hydrogen on structural changes in SiGe:H films |
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| Authors | |
| Year of publication | 2011 |
| Type | Article in Proceedings |
| Conference | Sborník příspěvků 5. České fotovoltaické konference |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | hydrogen; thin films; SiGe |
| Description | The paper focuses on studying the impact of the role of hydrogen on the properties of thin layers of SiGe: H. To determine the optoelectronic properties of films we used IR, PDS, CPM and intendation dynamic method for determining the mechanical properties. In addition, samples were subjected to measurements of the thermal desorption of hydrogen. The results indicate a different incorporation of hydrogen in films with variation of the deposition conditions. |
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