Project information
Study of hybrid deposition process and its application for thin film deposition

Information

This project doesn't include Institute of Computer Science. It includes Faculty of Science. Official project website can be found on muni.cz.

Project Identification

GP202/08/P038

Project Period

1/2008 - 12/2010

Investor / Pogramme / Project type

Czech Science Foundation

Postdoctoral projects

MU Faculty or unit

Faculty of Science

prof. Mgr. Petr Vašina, Ph.D.

Keywords

magnetron sputtering, hybrid PVD-PECVD, hysteresis behaviour, thin film deposition, nanocomposite, BCN

This project focuses on investigation of behaviour of hybrid PVD-PECVD process, which will be used for preparation of nanocomposite n-Ti:C/a-C:H and a-BCN:H materials. In this hybrid deposition process, a gaseous hydrocarbon will be used as a source of carbon instead of its conventional sputtering from magnetron target. Hysteresis behaviour of this process together with properties of deposited thin films will be investigated and compared with those of PVD process. Comparative study for two types of hydrocarbons will be performed. Advanced model of reactive sputtering assuming nonuniform discharge current density will be developed. This model will be extended to accommodate the interaction of gaseous hydrocarbon with all surfaces in the deposition chamber.

Publications

Total number of publications: 37

2011

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

VAŠINA Petr SOUČEK Pavel SCHMIDTOVÁ Tereza ELIÁŠ Marek BURŠÍKOVÁ Vilma JÍLEK Mojmír JÍLEK Mojmír Jr. SCHÄFER Jan BURŠÍK Jiří

Article in Periodical

Surface & Coatings Technology, year: 2011, volume: 205, edition: July, DOI
Experimental study of hybrid PVD-PECVD process of metallic target sputtering in argon and acetylene

SCHMIDTOVÁ Tereza SOUČEK Pavel VAŠINA Petr

Conference abstract

Year: 2011, type: Conference abstract
Study of hybrid PVD–PECVD process of Ti sputtering in argon and acetylene

SCHMIDTOVÁ Tereza SOUČEK Pavel VAŠINA Petr SCHÄFER Jan

Article in Periodical

Surface & Coatings Technology, year: 2011, volume: 205, edition: July, DOI

2010

Behaviour of Hybrid PVD-PECVD in Comparison with Conventional Reactive Magnetron Sputtering.

SCHMIDTOVÁ Tereza VAŠINA Petr

Conference abstract

Year: 2010, type: Conference abstract
Behaviour of Hybrid PVD-PECVD Process in Comparison with Conventional Reactive Magnetron Sputtering

SCHMIDTOVÁ Tereza VAŠINA Petr

Article in Proceedings

7th ICRP & 63rd GEC - CONFERENCE PROCEEDINGS, year: 2010
Behaviour of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene atmosphere

SCHMIDTOVÁ Tereza VAŠINA Petr

Article in Proceedings

Potential and Applications of Nanotretment of Medical Surface, year: 2010
Deposition and analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

SOUČEK Pavel VAŠINA Petr ELIÁŠ Marek BURŠÍKOVÁ Vilma SCHMIDTOVÁ Tereza JÍLEK Mojmír JÍLEK Mojmír jr. SCHÄFER Jan BURŠÍK Jiří

Conference abstract

Year: 2010, type: Conference abstract
Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

SOUČEK Pavel EL MEL Abdelazziz TESSIER Pierre-Yves ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr

Article in Proceedings

Potencial and Application of Nanotreatment of Medical Surfaces, year: 2010
Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

SOUČEK Pavel ABDELAZIZ El Mel PIERRE-YVES Tessier ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr

Conference abstract

Year: 2010, type: Conference abstract
Diagnostics of reactive magnetron sputtering

VAŠINA Petr DVOŘÁK Pavel SCHMIDTOVÁ Tereza

Conference abstract

Year: 2010, type: Conference abstract